[.ca] Introduction to Microelectromechanical Systems Engineering (ISBN 1580535909)

Too few practical details:
This book is for only someone that wants to browse through the field without actually doing anything. It contains very little information of the kind I was hoping for, like etch recipes with concentrations and temperatures. I used to have the Elwenspoeks "Silicon Micromachining". That one is much better, but someone took my copy and it is out of print...

Excellent introduction:
Lent this book to two MEMS novices who got excited and immediately bought their own copy.

Excellent introduction to MEMS:
A very useful book for someone with even little or no background in semiconductor processing.Amazingly logical explanations and very addicting for a technical book !

Excellent Introduction to MEMS:
An excellent non-technical introduction to the subject of Micromechanical Systems (MEMS). Nadim Maluf manages to cover the most important technical and economical issues of this broad topic with outstanding clarity and brevity. The MEMS market, materials and common transducer effects are presented as well as fundamental microfabrication/ -machining techniques and device packaging aspects. Emphasis is on explaining the working principles and fabrication of diverse microsensors and microactuators by case studies of commercially available systems (Ink Jet, Pressure Sensor, Flow Sensor, Radiation Sensor, Accelerometer, Gyroscope, Gas Sensor, Microphone, Microvalve and Micromirror) and emerging devices (DNA Amplification and Analysis, RF Switch, Micromechanical Resonator and Filter, Micropump, Optical Switches and Grating Light Valve, Thermomechanical Data Storage). Great read, fantastic illustrations and a wealth of well selected references for further reading.

Brief and to the point:
I am working in the MEMS area, and found lots of useful facts and recommendations in this book. It does not go into too much theoretical detail, but has a "cook book" style. Good for a general introduction to MEMS.